Sputtering Equipment - Canon Anelva E-400S
Product Specifications
Maker Canon Anelva
Model E-400S
Category Semiconductor (Pre-process)
Model year 2007
External Dimensions W1500 D1700 H2450
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number P20476
Product Overview
Canon Anelva E-400S is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: W1500 D1700 H2450. It is kept in stock at our Enzan Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Canon Anelva) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Accessories: Chiller (HRS050-A-20-B) / Vacuum pump (2033SD)
Film size: φ200mm
φ4 type planar magnetron cathode x 4
Substrate heating: Max 800℃
Power supply: Three-phase AC200V 50/60Hz
Attachments
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