CVD equipment - Samco PD-270STL
Product Specifications
Maker Samco
Model PD-270STL
Category Semiconductor (Pre-process)
Model year 2007
External Dimensions W1250 D2750 H2080
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number P31107
Mechanical Specifications
Applicable substrate size: Maximum 3 inch, 1 piece
Reaction chamber inner diameter φ425mm
Upper electrode φ280mm
Lower electrode φ276mm
High frequency power supply 13.56MHz Max1KW
Gases used: C2F6 O2 Ar
Raw material TEOS
3φ200V 50Hz
Attachments
Product Overview
Samco PD-270STL is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: W1250 D2750 H2080. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Samco) and the same category (Semiconductor (Pre-process)).
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