Etching equipment - Samco RIE-230iPC-AT
Product Specifications
Maker Samco
Model RIE-230iPC-AT
Category Semiconductor (Pre-process)
Model year 2023
External Dimensions (本体)W1210 D2100 H2100
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number P31176
Product Overview
Samco RIE-230iPC-AT is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: (本体)W1210 D2100 H2100. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Samco) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
[Power supply] φ3 200V 50Hz 75A [High frequency power supply] 13.56MHz ICP side 500W BIAS side 300W [Clamp] Electrostatic adsorption type/4 inch
[Gas types] Ci2/50ccm Ar/100ccm BCl3/50ccm O2/100ccm [Exhaust system] Turbo pump (330L/s) TG350FVAB/Osaka Vacuum Dry pump (1500/s) SDE120TXV/Kashiyama Kogyo x2 [Decontamination equipment] Chamber cleaning unit: RID-ACE/Ube Industries [Low temperature constant temperature water circulation system] NCC-3100/Tokyo Rikakikai
Attachments
※ Click on the image below to zoom in.
