Etching equipment - Samco RIE-230iPC-AT
Product Specifications
Maker Samco
Model RIE-230iPC-AT
Category Semiconductor (Pre-process)
Model year 2023
External Dimensions (本体)W1210 D2100 H2100
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number P31176
Mechanical Specifications
[Power supply] φ3 200V 50Hz 75A [High frequency power supply] 13.56MHz ICP side 500W BIAS side 300W [Clamp] Electrostatic adsorption type/4 inch
[Gas types] Ci2/50ccm Ar/100ccm BCl3/50ccm O2/100ccm [Exhaust system] Turbo pump (330L/s) TG350FVAB/Osaka Vacuum Dry pump (1500/s) SDE120TXV/Kashiyama Kogyo x2 [Decontamination equipment] Chamber cleaning unit: RID-ACE/Ube Industries [Low temperature constant temperature water circulation system] NCC-3100/Tokyo Rikakikai
Attachments
Product Overview
Samco RIE-230iPC-AT is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: (本体)W1210 D2100 H2100. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Samco) and the same category (Semiconductor (Pre-process)).
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