Plasma CVD equipment - ULVAC CC-200（SiH4）
Product Specifications
Maker ULVAC
Model CC-200（SiH4）
Category Semiconductor (Pre-process)
Model year 2007
External Dimensions W約800 D2300 H2000（本体）W1000 D1000 H1200（ﾄﾞﾗｲﾎﾟﾝﾌﾟ+ﾒｶﾆｶﾙﾌﾞｰｽﾀｰﾎﾟﾝﾌﾟ）W800 D550 H1600（ｷｬﾋﾞﾈｯﾄ型除害塔）
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number P31178
Product Overview
ULVAC CC-200（SiH4） is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. External dimensions: W約800 D2300 H2000（本体）W1000 D1000 H1200（ﾄﾞﾗｲﾎﾟﾝﾌﾟ+ﾒｶﾆｶﾙﾌﾞｰｽﾀｰﾎﾟﾝﾌﾟ）W800 D550 H1600（ｷｬﾋﾞﾈｯﾄ型除害塔）. It is kept in stock at our Kyushu Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Power supply: φ3 200V 15kVA
High frequency power supply: 27.12MHz 0.5kw
Transport tray size: 25cm x 25cm
Substrate size: 3 inch x 5 pieces (1 batch)
Gas type: O2/100ccm SiH4/Ar(20%)/250ccm CF4/500ccm
NH3/200ccm N2/1000ccm
N2O/2000ccm N2O/500ccm
Exhaust system: Mechanical booster pump + dry pump
Harm removal equipment: VEGACLEAN JGS45S type Taiyo Nippon Sanso
W1000 D1000 H1200 (Dry pump + mechanical booster pump) W800 D550 H1600 (Cabinet type detoxification tower)
Attachments
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