Plasma CVD equipment - ULVAC CC-200（SiH4）
Product Specifications
Maker ULVAC
Model CC-200（SiH4）
Category Semiconductor (Pre-process)
Model year 2007
External Dimensions W約800 D2300 H2000（本体）W1000 D1000 H1200（ﾄﾞﾗｲﾎﾟﾝﾌﾟ+ﾒｶﾆｶﾙﾌﾞｰｽﾀｰﾎﾟﾝﾌﾟ）W800 D550 H1600（ｷｬﾋﾞﾈｯﾄ型除害塔）
Condition Used
Showroom Information
Exhibition hall Kyushu Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number P31178
Mechanical Specifications
Power supply: φ3 200V 15kVA
High frequency power supply: 27.12MHz 0.5kw
Transport tray size: 25cm x 25cm
Substrate size: 3 inch x 5 pieces (1 batch)
Gas type: O2/100ccm SiH4/Ar(20%)/250ccm CF4/500ccm
NH3/200ccm N2/1000ccm
N2O/2000ccm N2O/500ccm
Exhaust system: Mechanical booster pump + dry pump
Harm removal equipment: VEGACLEAN JGS45S type Taiyo Nippon Sanso
W1000 D1000 H1200 (Dry pump + mechanical booster pump) W800 D550 H1600 (Cabinet type detoxification tower)
Attachments
Product Overview
ULVAC CC-200（SiH4） is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. External dimensions: W約800 D2300 H2000（本体）W1000 D1000 H1200（ﾄﾞﾗｲﾎﾟﾝﾌﾟ+ﾒｶﾆｶﾙﾌﾞｰｽﾀｰﾎﾟﾝﾌﾟ）W800 D550 H1600（ｷｬﾋﾞﾈｯﾄ型除害塔）. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (ULVAC) and the same category (Semiconductor (Pre-process)).
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