Ashing device - Tokyo Ohka Kogyo TCA-3822
Product Specifications
Maker Tokyo Ohka Kogyo
Model TCA-3822
Category Semiconductor (Pre-process)
Model year 2007
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number P90283
Product Overview
Tokyo Ohka Kogyo TCA-3822 is a used Semiconductor (Pre-process) item available from ASKINDEX Korea. It is kept in stock at our Enzan Technical Center showroom, so stock checks and price quotations are available immediately. You can also compare other used products from the same manufacturer (Tokyo Ohka Kogyo) and the same category (Semiconductor (Pre-process)).
Mechanical Specifications
Configuration: Main unit/power supply unit/2 dry pumps/2 tellers
Applicable wafer: φ150mm
RF power supply: RFF20Z (13.56MHz 2kW)
Power supply: Three-phase AC200V 50/60Hz 75A
Attachments
※ Click on the image below to zoom in.
