Ashing device - Tokyo Ohka Kogyo TCA-3822
Product Specifications
Maker Tokyo Ohka Kogyo
Model TCA-3822
Category Semiconductor (Pre-process)
Model year 2007
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number P90283
Mechanical Specifications
Configuration: Main unit/power supply unit/2 dry pumps/2 tellers
Applicable wafer: φ150mm
RF power supply: RFF20Z (13.56MHz 2kW)
Power supply: Three-phase AC200V 50/60Hz 75A
Attachments
Product Overview
Tokyo Ohka Kogyo TCA-3822 is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Tokyo Ohka Kogyo) and the same category (Semiconductor (Pre-process)).
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