ICP etching equipment - Sumitomo Precision Products MUC-21-036
Product Specifications
Maker Sumitomo Precision Products
Model MUC-21-036
Category Semiconductor (Pre-process)
Model year 2004
Condition Used
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number Q20313
Mechanical Specifications
The process chamber is configured for Si trench etching
Plasma is 13.56MHz
Dry pump (Edwards IQDP80),
Dry pump (Edwards IH80-MK5)
Chiller (RISSHI μEX-1102), Chiller (NESLAB M75)
Scroll pump (BUSCH F0 0030 B 0H0..XX)
Instruction manual and other accessories included
Attachments
Product Overview
Sumitomo Precision Products MUC-21-036 is a used Semiconductor (Pre-process) item handled by ASKINDEX Korea. This listing has sold, but you can ask about restock or a similar unit, and request a quote. You can also compare other used products from the same manufacturer (Sumitomo Precision Products) and the same category (Semiconductor (Pre-process)).
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